Purohit, S., Swarnalatha, V., Pandey, A. K., & Pal, P. (2022, December). Wet anisotropic etching characteristics of Si{111} in NaOH-based solution for silicon bulk micromachining. Micro and Nano Systems Letters.
Chicago Style (17th ed.) CitationPurohit, S., V. Swarnalatha, A. K. Pandey, and P. Pal. "Wet Anisotropic Etching Characteristics of Si{111} in NaOH-based Solution for Silicon Bulk Micromachining." Micro and Nano Systems Letters Dec. 2022.
MLA (9th ed.) CitationPurohit, S., et al. "Wet Anisotropic Etching Characteristics of Si{111} in NaOH-based Solution for Silicon Bulk Micromachining." Micro and Nano Systems Letters, Dec. 2022.
Warning: These citations may not always be 100% accurate.
