Wet anisotropic etching characteristics of Si{111} in NaOH-based solution for silicon bulk micromachining

Abstract Silicon bulk micromachining is extensively employed method in microelectromechanical systems (MEMS) for the formation of freestanding (e.g., cantilevers) and fixed (e.g., cavities) microstructures. Wet anisotropic etching is a popular technique to perform silicon micromachining as it is low...

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Bibliographic Details
Published in:Micro and Nano Systems Letters
Main Authors: S. Purohit, V. Swarnalatha, A. K. Pandey, P. Pal
Format: Article
Language:English
Published: SpringerOpen 2022-12-01
Subjects:
Silicon
Si{111}
Anisotropic etching
MEMS
NaOH
NH2OH
Online Access:https://doi.org/10.1186/s40486-022-00162-7

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