An Improved YOLOv7-Tiny-Based Algorithm for Wafer Surface Defect Detection

Wafer surface defect detection is a critical component in the chip manufacturing process. To address the shortcomings of manual inspection and the limitations of existing machine learning methods, this paper proposes a wafer defect detection algorithm based on an improved YOLOv7-tiny. First, a coord...

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Bibliographic Details
Published in:IEEE Access
Main Authors: Mengyun Li, Xueying Wang, Hongtao Zhang, Xiaofeng Hu
Format: Article
Language:English
Published: IEEE 2025-01-01
Subjects:
YOLOv7-tiny
silicon wafer
object detection
deep learning
Online Access:https://ieeexplore.ieee.org/document/10836686/

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