A Piezoelectric Stick-Slip Nanopositioning Stage With Ultra-High Load Capacity Realizing by Decoupling the Driving and Moving Units

The stick-slip piezoelectric stage plays an important role in micro-operation and industrial applications due to its nanometer resolution. However, under high load, the output performance of the piezoelectric stage will be seriously influenced. In order to overcome this limitation, this paper propos...

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Bibliographic Details
Published in:	IEEE Access
Main Authors:	Yang Yu, Qiang Gao, Xiaosong Zhang, Guangda Qiao, Yi Han, Xiaohui Lu, Tinghai Cheng
Format:	Article
Language:	English
Published:	IEEE 2019-01-01
Subjects:	Stick-slip nanopositioning stage ultra-high load capacity high resolution
Online Access:	https://ieeexplore.ieee.org/document/8854078/

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