Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe

A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately...

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Bibliographic Details
Published in:Micromachines
Main Authors: Fan Zhang, Qing Yang, Hao Bian, Xun Hou, Feng Chen
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Subjects:
infrared optics
femtosecond laser
microlens array
ZnSe
Online Access:https://www.mdpi.com/2072-666X/12/4/458
Description
Summary:A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately 0.76–20 μm were fabricated within 36 min. More importantly, the size of the microlenses can be controlled by adjusting the laser power. Their high-quality infrared optical performance was also demonstrated. This method holds great promise for the development of ZnSe-based micro-optical devices.
ISSN:2072-666X

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