Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe
A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately...
| Published in: | Micromachines |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/4/458 |
| _version_ | 1851838060518440960 |
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| author | Fan Zhang Qing Yang Hao Bian Xun Hou Feng Chen |
| author_facet | Fan Zhang Qing Yang Hao Bian Xun Hou Feng Chen |
| author_sort | Fan Zhang |
| collection | DOAJ |
| container_title | Micromachines |
| description | A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately 0.76–20 μm were fabricated within 36 min. More importantly, the size of the microlenses can be controlled by adjusting the laser power. Their high-quality infrared optical performance was also demonstrated. This method holds great promise for the development of ZnSe-based micro-optical devices. |
| format | Article |
| id | doaj-art-e8cae56497cd48c8a4a4ea92c28dd39b |
| institution | Directory of Open Access Journals |
| issn | 2072-666X |
| language | English |
| publishDate | 2021-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| spelling | doaj-art-e8cae56497cd48c8a4a4ea92c28dd39b2025-08-19T22:29:35ZengMDPI AGMicromachines2072-666X2021-04-0112445810.3390/mi12040458Rapid Fabrication of Large-Area Concave Microlens Array on ZnSeFan Zhang0Qing Yang1Hao Bian2Xun Hou3Feng Chen4State Key Laboratory for Manufacturing System Engineering, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaSchool of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing System Engineering, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing System Engineering, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing System Engineering, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaA rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately 0.76–20 μm were fabricated within 36 min. More importantly, the size of the microlenses can be controlled by adjusting the laser power. Their high-quality infrared optical performance was also demonstrated. This method holds great promise for the development of ZnSe-based micro-optical devices.https://www.mdpi.com/2072-666X/12/4/458infrared opticsfemtosecond lasermicrolens arrayZnSe |
| spellingShingle | Fan Zhang Qing Yang Hao Bian Xun Hou Feng Chen Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe infrared optics femtosecond laser microlens array ZnSe |
| title | Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe |
| title_full | Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe |
| title_fullStr | Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe |
| title_full_unstemmed | Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe |
| title_short | Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe |
| title_sort | rapid fabrication of large area concave microlens array on znse |
| topic | infrared optics femtosecond laser microlens array ZnSe |
| url | https://www.mdpi.com/2072-666X/12/4/458 |
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