Fabrication of low-loss symmetrical rib waveguides based on x-cut lithium niobate on insulator for integrated quantum photonics

Lithium niobate on insulator (LNOI) is a promising material platform for applications in integrated quantum photonics. A low optical loss is crucial for preserving fragile quantum states. Therefore, in this study, we have fabri-cated LNOI rib waveguides with a low optical propagation loss of 0.16 dB...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:ETRI Journal
المؤلفون الرئيسيون: Hong-Seok Kim, Guhwan Kim, Tetiana Slusar, Jinwoo Kim, Jiho Park, Jaegyu Park, Hyeon Hwang, Woojin Noh, Hansuek Lee, Min-Kyo Seo, Kiwon Moon, Jung Jin Ju
التنسيق: مقال
اللغة:الإنجليزية
منشور في: Electronics and Telecommunications Research Institute (ETRI) 2024-10-01
الموضوعات:
integrated quantum photonics
lithium niobate on insulator
low-loss rib waveguide
microring resonator
shallow etching
الوصول للمادة أونلاين:https://doi.org/10.4218/etrij.2024-0137
الوصف
الملخص:Lithium niobate on insulator (LNOI) is a promising material platform for applications in integrated quantum photonics. A low optical loss is crucial for preserving fragile quantum states. Therefore, in this study, we have fabri-cated LNOI rib waveguides with a low optical propagation loss of 0.16 dB/cm by optimizing the etching conditions for various parameters. The symmetry and smoothness of the waveguides on x-cut LNOI are improved by employing a shallow etching process. The proposed method is expected to facilitate the development of on-chip quantum photonic devices based on LNOI.
تدمد:1225-6463
2233-7326

مواد مشابهة