Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror

Blazed gratings are the critical dispersion elements in spectral analysis instruments, whose performance depends on structural parameters and topography of the grating groove. In this paper, high diffraction efficiency silicon-blazed grating working at 800–2500 nm has been designed and fabricated. B...

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Bibliographic Details
Published in:	Micromachines
Main Authors:	Sinong Zha, Dongling Li, Quan Wen, Ying Zhou, Haomiao Zhang
Format:	Article
Language:	English
Published:	MDPI AG 2022-06-01
Subjects:	silicon-blazed grating platform and fillet anisotropic wet etching oxidation sharpening diffraction efficiency
Online Access:	https://www.mdpi.com/2072-666X/13/7/1000

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