Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer
This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate....
| الحاوية / القاعدة: | Sensors |
|---|---|
| المؤلفون الرئيسيون: | , |
| التنسيق: | مقال |
| اللغة: | الإنجليزية |
| منشور في: |
MDPI AG
2020-06-01
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| الموضوعات: | |
| الوصول للمادة أونلاين: | https://www.mdpi.com/1424-8220/20/11/3333 |
| _version_ | 1850409987038248960 |
|---|---|
| author | Wei Liu Dawei Wu |
| author_facet | Wei Liu Dawei Wu |
| author_sort | Wei Liu |
| collection | DOAJ |
| container_title | Sensors |
| description | This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate. A low temperature (<100 °C) adhesive bonding technique is adopted in the fabrication process. Finite element analysis (FEA) is implemented to confirm the capability of predicting the resonant frequency of composite diaphragms and optimizing the device. The manufactured PMUT exhibits a center frequency of 198 kHz with a wide operational bandwidth. Its acoustic performance is demonstrated by transmitting and receiving ultrasound in air on curved surface. The conclusions from this study indicate the proposed PMUT has great potential in ultrasonic and wearable devices applications. |
| format | Article |
| id | doaj-art-edbd3dbde2eb444d9d7b47a8a22b64a7 |
| institution | Directory of Open Access Journals |
| issn | 1424-8220 |
| language | English |
| publishDate | 2020-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| spelling | doaj-art-edbd3dbde2eb444d9d7b47a8a22b64a72025-08-19T22:47:04ZengMDPI AGSensors1424-82202020-06-012011333310.3390/s20113333Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic TransducerWei Liu0Dawei Wu1State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, ChinaState Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, ChinaThis paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate. A low temperature (<100 °C) adhesive bonding technique is adopted in the fabrication process. Finite element analysis (FEA) is implemented to confirm the capability of predicting the resonant frequency of composite diaphragms and optimizing the device. The manufactured PMUT exhibits a center frequency of 198 kHz with a wide operational bandwidth. Its acoustic performance is demonstrated by transmitting and receiving ultrasound in air on curved surface. The conclusions from this study indicate the proposed PMUT has great potential in ultrasonic and wearable devices applications.https://www.mdpi.com/1424-8220/20/11/3333flexiblepiezoelectric micromachined ultrasonic transducer (PMUT)airlow temperature adhesive bondingtime of flight (TOF) |
| spellingShingle | Wei Liu Dawei Wu Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer flexible piezoelectric micromachined ultrasonic transducer (PMUT) air low temperature adhesive bonding time of flight (TOF) |
| title | Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer |
| title_full | Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer |
| title_fullStr | Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer |
| title_full_unstemmed | Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer |
| title_short | Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer |
| title_sort | low temperature adhesive bonding based fabrication of an air borne flexible piezoelectric micromachined ultrasonic transducer |
| topic | flexible piezoelectric micromachined ultrasonic transducer (PMUT) air low temperature adhesive bonding time of flight (TOF) |
| url | https://www.mdpi.com/1424-8220/20/11/3333 |
| work_keys_str_mv | AT weiliu lowtemperatureadhesivebondingbasedfabricationofanairborneflexiblepiezoelectricmicromachinedultrasonictransducer AT daweiwu lowtemperatureadhesivebondingbasedfabricationofanairborneflexiblepiezoelectricmicromachinedultrasonictransducer |