Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer

Optical fiber Fabry–Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Yongzhang Chen, Yiwen Zheng, Haibing Xiao, Dezhi Liang, Yufeng Zhang, Yongqin Yu, Chenlin Du, Shuangchen Ruan
Format:	Article
Language:	English
Published:	MDPI AG 2022-08-01
Subjects:	fiber probe sensor microcantilever micromachining Fabry–Perot cavity
Online Access:	https://www.mdpi.com/1424-8220/22/15/5748