Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. Erratum

Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. Erratum

An error in the paper by Pflüger, Soltwisch, Probst, Scholze & Krumrey [IUCrJ (2017), 431–438] is corrected.

Bibliographic Details
Main Authors: Mika Pflüger, Victor Soltwisch, Jürgen Probst, Frank Scholze, Michael Krumrey
Format: Article
Language:English
Published: International Union of Crystallography 2018-07-01
Series:IUCrJ
Subjects:
grazing-incidence small-angle X-ray scattering
GISAXS
beam footprint
lithographic inspection
gratings
Online Access:http://scripts.iucr.org/cgi-bin/paper?S2052252518008497

Internet

http://scripts.iucr.org/cgi-bin/paper?S2052252518008497

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