Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO<sub>2</sub> Balls Mask

Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO<sub>2</sub> Balls Mask

Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO<sub>2</sub> was...

Full description

Bibliographic Details
Main Authors: Zongchen Liu, Tian-Fei Zhu, Yan-Feng Wang, Irfan Ahmed, Zhangcheng Liu, Feng Wen, Xiaofan Zhang, Wei Wang, Shuwei Fan, Kaiyue Wang, Hong-Xing Wang
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Materials
Subjects:
diamond
NV center
microstructure fabrication
micro-optical devices
Online Access:https://www.mdpi.com/1996-1944/12/10/1622

Internet

https://www.mdpi.com/1996-1944/12/10/1622

Similar Items