Automated reactive thermal evaporation system for transparent conductive coatings

Automated reactive thermal evaporation system for transparent conductive coatings

This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full contr...

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Bibliographic Details
Main Authors: Miguel Fernandes, Yuri Y. Vygranenko, Manuela Vieira, Guilherme Lavareda, Carlos Nunes de Carvalho, Ana Amaral
Format: Article
Language:English
Published: Instituto Superior de Engenharia de Lisboa (ISEL) 2017-10-01
Series:ISEL Academic Journal of Electronics, Telecommunications and Computers
Subjects:
TCO, Solar cell, PLastic substrate
Online Access:http://journals.isel.pt/index.php/i-ETC/article/view/36

Internet

http://journals.isel.pt/index.php/i-ETC/article/view/36

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