Measurement Method for Nonlinearity in Heterodyne Laser Interferometers Based on Double-Channel Quadrature Demodulation
The phase quadrature measurement method is capable of measuring nonlinearity in heterodyne laser interferometers with picometer accuracy whereas it cannot be applied in the new kind of heterodyne interferometers with bidirectional Doppler frequency shift especially in the condition of non-uniform mo...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-08-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/18/9/2768 |