Direct laser written polymer waveguides with out of plane couplers for optical chips
Optical technologies call for waveguide networks featuring high integration densities, low losses, and simple operation. Here, we present polymer waveguides fabricated from a negative tone photoresist via two-photon-lithography in direct laser writing, and show a detailed parameter study of their pe...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2017-10-01
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Series: | APL Photonics |
Online Access: | http://dx.doi.org/10.1063/1.4994806 |