A Modified FNN Fault Diagnosis on PCVD Microwave System
A modified FNN fault diagnosis algorithm is presented in this paper for microwave subsystem of Plasma Chemical Vapor Deposition (PCVD). The symptom variables are selected as the crisp inputs, and the corresponding membership functions are obtained from premeasured data as well as experts’ diagnostic...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2015-01-01
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| Series: | Advances in Fuzzy Systems |
| Online Access: | http://dx.doi.org/10.1155/2015/632456 |