Linear Piezoelectric Motor for Topography Detector of Diamond Wire
In topography detection procedures for diamond wire, precision motion control is one of the key preconditions; the motion control unit of detection needs both micron resolutions and centimeter strokes. In this paper, a linear motor with four sets of multilayer piezoelectric actuators was developed t...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8896841/ |