Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers
An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric micromachined ultrasonic transducer (pMUT) design in 31 mode, considering an arbitrary electrode configuration at any axisymmetric vibration mode. The explicit definition of lumped parameters based entirely...
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE),
2015-09-15T16:39:45Z.
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| Subjects: | |
| Online Access: | Get fulltext |