A Study of -SiC/Si Multilayer Heterojunction structures for Photodetector Applications
碩士 === 國立成功大學 === 電機工程研究所 === 84 === In this thesis, single-crystal SiC / single-crystal Si ultilayer heterojunction photodetectors were fabricatedn Si substrates by rapid thermal chemical vaporeposition (RTCVD) method. Three...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/79403586537486847590 |