Determining thermal expansion coefficients of thin films using micromachined cantilevers
碩士 === 國立清華大學 === 動力機械工程學系 === 87 === In this research the coefficient of thermal expansion (CTE) of thin films was studied through analytical and experimental approaches using micromachined beams. Both single layer and bilayer micromachined cantilevers (microcantilevers) were exploited...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1999
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Online Access: | http://ndltd.ncl.edu.tw/handle/98163813917677002051 |