Integration and Characterization of Novel Rapid Thermal Process and Device Applications
博士 === 國立臺灣大學 === 電機工程學研究所 === 90 === In this thesis, metal-oxide-silicon (MOS) tunneling diode was fabricated by rapid thermal process (RTP), and the characteristics of the devices were investigated. The performance and reliability of the devices have been enhanced by process modificatio...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77071876302762879122 |