Design and Implementation of In-Process FOUP Exchange in Semiconductor Manufacturing

碩士 === 國立交通大學 === 資訊學院碩士在職專班資訊組 === 98 === Semiconductor manufacturing is an expensive investment. Depreciations of the equipments need years to cover while the growth of information technology accelerates year by year. Although the factories maximize the throughput and their capacity of manufactu...

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Bibliographic Details
Main Authors: Yang, Shen-Chia, 楊申甲
Other Authors: Lee, Suh-Yin
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/78503829199854580445