Screen Printed PZT Composite Thick Films
Composite film (ComFi) technology has been developed as an alternative technique to achieve thick (5-100 ?m) films at temperatures compatible with silicon processing. The technique entails producing a composite slurry consisting of PZT powder and a PZT producing sol. The slurry is then deposited ont...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2004.
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| Subjects: | |
| Online Access: | Get fulltext |