Screen Printed PZT Composite Thick Films

Composite film (ComFi) technology has been developed as an alternative technique to achieve thick (5-100 ?m) films at temperatures compatible with silicon processing. The technique entails producing a composite slurry consisting of PZT powder and a PZT producing sol. The slurry is then deposited ont...

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Bibliographic Details
Main Authors: Dorey, R (Author), Whatmore, R (Author), Beeby, S (Author), Torah, R (Author), White, N (Author)
Format: Article
Language:English
Published: 2004.
Subjects:
Online Access:Get fulltext

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