Search Results - MECHANICAL ENGINEERING DESIGN

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Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator

by Jingjing Feng, Cheng Liu, Wei Zhang, Jianxin Han, Shuying Hao
Published 2019-03-01
“.... The mechanical properties of a micro-resonator can be enhanced by optimizing the two section parameters...”

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Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

by Jingjing Feng, Cheng Liu, Wei Zhang, Shuying Hao
Published 2018-01-01
“...The micro-electro-mechanical system (MEMS) resonator developed based on surface processing...”

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