Atomic layer deposition 10 Atomic-layer deposition 6 Alumina 4 Aluminum oxide 4 Hafnium oxides 3 atomic layer deposition 3 Annealing 2 Atomic layer deposition (ALD) 2 Computer circuits 2 Drain current 2 GaInAs 2 High electron mobility transistors 2 III-V semiconductors 2 Impact ionization 2 Inverse subthreshold slope 2 Inverse subthreshold slopes 2 Ions 2 Logic gates 2 MOS devices 2 MOS-FET 2 MOSFET 2 MOSFET devices 2 MOSFETs 2 Photons 2 RF performance 2 Semiconductor alloys 2 Steep slope 2 Surface reactions 2 Thin films 2 Thin-films 2