Atomic layer deposition 1 Atomic-layer deposition 1 Calibration 1 Electron beam lithography 1 High-precision 1 Linewidth 1 Linewidth regulation 1 Measurements instruments 1 Micro-and nano-metrology 1 Nanograting 1 Nanometrology 1 One-dimensional 1 One-dimensional nano-grating standard 1 Optoelectronic devices 1 Periodic structures 1 Tuning 1 Uncertainty analysis 1 atomic layer deposition (ALD) 1 linewidth regulation 1 micro-and nano-metrology 1 one-dimensional nano-grating standard 1