Effects of Plasma Surface Modification TiN Implantation on Ti
碩士 === 大同工學院 === 材料科學(工程)研究所 === 81 === This research applied three kinds of different physical vapor deposition processes, namely, electron-beam evaporation, hollow cathode deposition and cathode arc plasma deposition for titanium nitride films coating o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1993
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91252171792767808364 |