Area-Selective Growth of Aligned ZnO Nanorod Arrays for MEMS Device Applications

ZnO nanorods (NRs) arrays with good vertical alignment were selectively grown on microscale patterned surfaces by a MEMS-compatible, low-temperature chemical-bath deposition method (CBD). The direct-current (DC) sputtered and subsequently annealed ZnO seed-layer was found to have a crucial effect on...

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Bibliographic Details

Published in:	Proceedings
Main Authors:	Jiushuai Xu, Klass Strempel, Hao Zhou, Andreas Waag, Maik Bertke, Angelika Schmidt, Erwin Peiner
Format:	Article
Language:	English
Published:	MDPI AG 2018-11-01
Subjects:	area-selective growth ZnO nanorods MEMS DC sputtering/annealing
Online Access:	https://www.mdpi.com/2504-3900/2/13/887