Influence of crystal anisotropy and process parameters on surface shape deviation of sapphire slicing

Due to the anisotropy of sapphire crystal material, the mechanical properties vary in multi-wire saw slicing based on different cutting positions. This variation leads to the deviation of the diamond wire in the vertical feed direction, resulting in the surface shape deviation of the sapphire wafers...

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Bibliographic Details

Published in:	Jin'gangshi yu moliao moju gongcheng
Main Authors:	Chao WANG, Peiqi GE, Jikai He, Xinhui WANG
Format:	Article
Language:	Chinese
Published:	Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2023-10-01
Subjects:	sapphire diamond wire saw crystal anisotropy surface shape deviation process parameter
Online Access:	http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0207