Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC)

Single-crystal silicon carbide (SiC) is widely used because of its excellent properties. However, SiC is a typical hard and brittle material, and there are many challenges in realizing its high efficiency and high-precision machining. Grinding is the main method used to achieve the high-efficiency p...

Full description

Bibliographic Details

Published in:	Micromachines
Main Authors:	Wuqing Lin, Zhongwei Hu, Yue Chen, Yuqiang Zhang, Yiqing Yu, Xipeng Xu, Jie Zhang
Format:	Article
Language:	English
Published:	MDPI AG 2022-04-01
Subjects:	molecular dynamics method SiC polytypes vibration-assisted scratch scratch characteristics
Online Access:	https://www.mdpi.com/2072-666X/13/4/640