Multiphase Actuation of AC Electrothermal Micropump
Electrothermal micropumps apply an AC electric field to a conductive fluid within the range of 10 kHz–1 MHz to generate fluid flow. In this frequency range, coulombic forces dominate fluid interactions over opposing dielectric forces, resulting in high flow rates (~50–100 μm/s). To date, the electro...
| Published in: | Micromachines |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
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| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/4/758 |