A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

We demonstrate an experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for applications demanding energy-efficient and high-quality image projection. Frequency response measurements at 10 different v...

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書誌詳細

出版年:	Proceedings
主要な著者:	Clement Fleury, Markus Bainschab, Gianluca Mendicino, Roberto Carminati, Pooja Thakkar, Dominik Holzmann, Sara Guerreiro, Adrien Piot
フォーマット:	論文
言語:	英語
出版事項:	MDPI AG 2024-04-01
主題:	MEMS scanning micromirror air damping dynamic deformation
オンライン･アクセス:	https://www.mdpi.com/2504-3900/97/1/144