Optimal Design of Electromagnetically Actuated MEMS Cantilevers

In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subseque...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Paolo Di Barba, Teodor Gotszalk, Wojciech Majstrzyk, Maria Evelina Mognaschi, Karolina Orłowska, Sławomir Wiak, Andrzej Sierakowski
Format:	Article
Language:	English
Published:	MDPI AG 2018-08-01
Subjects:	electromagnetically actuated cantilevers nanometrology multiobjective optimization active cantilevers SOI-based prototyping
Online Access:	http://www.mdpi.com/1424-8220/18/8/2533