Emerging Plasma Nanotechnology
Developments in plasma process technology have led to innovative advances in the miniaturization and integration of semiconductor devices. However, when semiconductor devices are utilized in the nanoscale domain, defects or damage related to charged particles and ultraviolet (UV) rays emitted from t...
| Published in: | IEEE Open Journal of Nanotechnology |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2022-01-01
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| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9931942/ |