Emerging Plasma Nanotechnology
Developments in plasma process technology have led to innovative advances in the miniaturization and integration of semiconductor devices. However, when semiconductor devices are utilized in the nanoscale domain, defects or damage related to charged particles and ultraviolet (UV) rays emitted from t...
| 發表在: | IEEE Open Journal of Nanotechnology |
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| 主要作者: | |
| 格式: | Article |
| 語言: | 英语 |
| 出版: |
IEEE
2022-01-01
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| 主題: | |
| 在線閱讀: | https://ieeexplore.ieee.org/document/9931942/ |