Emerging Plasma Nanotechnology

Developments in plasma process technology have led to innovative advances in the miniaturization and integration of semiconductor devices. However, when semiconductor devices are utilized in the nanoscale domain, defects or damage related to charged particles and ultraviolet (UV) rays emitted from t...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:	IEEE Open Journal of Nanotechnology
المؤلف الرئيسي:	Seiji Samukawa
التنسيق:	مقال
اللغة:	الإنجليزية
منشور في:	IEEE 2022-01-01
الموضوعات:	Atomic layer defect-free etching Atomic layer defect-free deposition 3D Fin FET Quantum dot devices Super low-k film MRAM
الوصول للمادة أونلاين:	https://ieeexplore.ieee.org/document/9931942/

مواد مشابهة

Atomic Layer Deposition of Lithium Fluoride Optical Coatings for the Ultraviolet
حسب: John Hennessy, وآخرون
منشور في: (2018-05-01)

Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching
حسب: William Chiappim, وآخرون
منشور في: (2022-10-01)

Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
حسب: Yuanlu Tsai, وآخرون
منشور في: (2022-02-01)

Wear and Abrasion Resistance of Nitride Coatings on Ceramic Substrates Processed with Fast Argon Atoms
حسب: Sergey N. Grigoriev, وآخرون
منشور في: (2024-09-01)

Controlled Engineering of Defects and Interfaces in Thermoelectric Materials With Atomic Layer Deposition
حسب: Gwang Min Park, وآخرون
منشور في: (2025-02-01)

Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
حسب: Bao Zhu, وآخرون
منشور في: (2019-03-01)

Halogen‐Free Anisotropic Atomic‐Layer Etching of HfO2 at Room Temperature
حسب: Shih‐Nan Hsiao, وآخرون
منشور في: (2025-10-01)

Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors
حسب: Lin-Yan Xie, وآخرون
منشور في: (2020-01-01)

Plasma-Enhanced Atomic Layer Deposition-Based Ferroelectric Field-Effect Transistors
حسب: Chinsung Park, وآخرون
منشور في: (2024-01-01)

Efforts of implementing ultra‐flexible thin‐film encapsulation for optoelectronic devices based on atomic layer deposition technology
حسب: Guanran Wang, وآخرون
منشور في: (2024-12-01)

Fabrication of Silicon Nanowire Metal-Oxide-Semiconductor Capacitors with Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> Stacked Dielectric Films for the Application to Energy Storage Devices
حسب: Ryota Nezasa, وآخرون
منشور في: (2021-07-01)

Cadmium‐Free Kesterite Thin‐Film Solar Cells with High Efficiency Approaching 12%
حسب: Nafees Ahmad, وآخرون
منشور في: (2023-09-01)

Effect of the ZnSnO/AZO Interface on the Charge Extraction in Cd-Free Kesterite Solar Cells
حسب: Carla Gobbo, وآخرون
منشور في: (2023-05-01)

Spin-Resolved Visible Optical Spectra and Electronic Characteristics of Defect-Mediated Hexagonal Boron Nitride Monolayer
حسب: Sheng Yu, وآخرون
منشور في: (2022-06-01)

Two-Dimensional Perovskite Crystals Formed by Atomic Layer Deposition of CaTiO<sub>3</sub> on γ-Al<sub>2</sub>O<sub>3</sub>
حسب: Tianyu Cao, وآخرون
منشور في: (2021-08-01)

Growth chemistry of cobalt nitride by plasma enhanced atomic layer deposition
حسب: S O’Donnell, وآخرون
منشور في: (2022-01-01)

Enhanced Thermal Stability of Conductive Mercury Telluride Colloidal Quantum Dot Thin Films Using Atomic Layer Deposition
حسب: Edward W. Malachosky, وآخرون
منشور في: (2024-08-01)

Layer Number Controllable Molybdenum Disulfide Film Growth and Its Applications in Vertical and Planar Photodetectors
حسب: Yu‐Han Huang, وآخرون
منشور في: (2025-03-01)

Interfaces in Atomic Layer Deposited Films: Opportunities and Challenges
حسب: Syed Jazib Abbas Zaidi, وآخرون
منشور في: (2023-10-01)

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation
حسب: Ivan Erofeev, وآخرون
منشور في: (2025-01-01)

Plasma-Enhanced Atomic Layer Deposition of Hematite for Photoelectrochemical Water Splitting Applications
حسب: Thom R. Harris-Lee, وآخرون
منشور في: (2024-08-01)

Perylenes, Porphyrins, and Other Large Dye Molecules for Molecular Layer Deposition
حسب: Per‐Anders Hansen, وآخرون
منشور في: (2024-01-01)

Atomic and Molecular Layer Deposition as Surface Engineering Techniques for Emerging Alkali Metal Rechargeable Batteries
حسب: Matthew Sullivan, وآخرون
منشور في: (2022-09-01)

Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors
حسب: Qian Ma, وآخرون
منشور في: (2018-01-01)

Application of Defect Engineering via ALD in Supercapacitors
حسب: Tiange Gao, وآخرون
منشور في: (2024-12-01)

Atomic Layer Deposition of Molybdenum Carbide Thin Films
حسب: Paloma Ruiz Kärkkäinen, وآخرون
منشور في: (2024-09-01)

Tuning Material Properties of ZnO Thin Films for Advanced Sensor Applications
حسب: Julian Pilz, وآخرون
منشور في: (2018-12-01)

Atomic Layer Deposition of Ru Thin Film Using a Newly Synthesized Precursor with Open‐Coordinated Ligands
حسب: Seung Hoon Oh, وآخرون
منشور في: (2023-06-01)

Comparative Study of Novel u-Shaped SOI FinFET Against Multiple-Fin Bulk/SOI FinFET
حسب: Myoungsu Son, وآخرون
منشور في: (2023-01-01)

Atomic layer deposition technology for the development of high-quality, full-colour micro-LED displays
حسب: Zijun Yan, وآخرون
منشور في: (2024-01-01)

Atomic Layer Deposition of High-k Insulators on Epitaxial Graphene: A Review
حسب: Filippo Giannazzo, وآخرون
منشور في: (2020-04-01)

Contribution to the Physical Modelling of Single Charged Defects Causing the Random Telegraph Noise in Junctionless FinFET
حسب: Atabek E. Atamuratov, وآخرون
منشور في: (2020-08-01)

High-uniformity atomic layer deposition of superconducting niobium nitride thin films for quantum photonic integration
حسب: C T Lennon, وآخرون
منشور في: (2023-01-01)

A Review on Reactor Design and Surface Modification of Atomic Layer Deposition for Functional Nanoparticles
حسب: Guanghui Yan, وآخرون
منشور في: (2025-07-01)

One‐Size‐Fits‐All: A Universal Binding Site for Single‐Layer Metal Cluster Self‐Assembly
حسب: Emerson C. Kohlrausch, وآخرون
منشور في: (2025-10-01)

Hardness, Modulus, and Refractive Index of Plasma-Assisted Atomic-Layer-Deposited Hafnium Oxide Thin Films Doped with Aluminum Oxide
حسب: Mikk Kull, وآخرون
منشور في: (2023-05-01)

Stabilization of Ni-YSZ Anodes in Solid Oxide Fuel Cells using an ALD-Grown Aluminum Titanate Interlayer
حسب: Zhuoming Feng, وآخرون
منشور في: (2024-01-01)

Magnesium Sublimation for Growing Thin Films and Conformal Coatings on 1D Nanostructures
حسب: Aaron J. Austin, وآخرون
منشور في: (2022-10-01)

Recent Advances in Seeded and Seed-Layer-Free Atomic Layer Deposition of High-K Dielectrics on Graphene for Electronics
حسب: Emanuela Schilirò, وآخرون
منشور في: (2019-09-01)

Atomic Layer Deposition of Inorganic Thin Films on 3D Polymer Nanonetworks
حسب: Jinseong Ahn, وآخرون
منشور في: (2019-05-01)