Sputtering Deposition With Low Cost Multi-Element Powder Targets
Compared to solid target, powder target is low cost and can be varied in wide range of elemental combinations. Transparent and conductive aluminum-doped zinc oxide (AZO) thin films were prepared by sputter deposition using a mixed powder target consisting of zinc oxide and aluminum oxide powders at...
| Published in: | IEEE Open Journal of Nanotechnology |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2023-01-01
|
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10298617/ |