MEMS resonators with electrostatic actuation and piezoresistive readout for sensing applications

MEMS resonators based on internal thermal-piezoresistive amplification are a suitable alternative for sensing applications since they enable high resonance frequencies and high Q-factors. In this work, the principle of operation of this amplification mechanism is modeled, using analytical and lumped...

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Bibliographic Details

Published in:	Micro and Nano Engineering
Main Authors:	Cláudia Coelho, George Machado, Jr, Jorge Cabral, Luís Rocha
Format:	Article
Language:	English
Published:	Elsevier 2022-08-01
Subjects:	Electrostatic actuation Thermal-piezoresistive amplification MEMS resonator Piezoresistive readout
Online Access:	http://www.sciencedirect.com/science/article/pii/S2590007222000557