Enhanced Measurement Accuracy for Nanostructures Using Hybrid Metrology

Light-matter interplay is widely used for analyzing the topology of surfaces on small scales for use in areas such as nanotechnology, nanoelectronics, photonics, and advanced materials. Conventional optical microscope imaging methods are limited in resolution to a value comparable to the wavelength,...

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Bibliographic Details

Published in:	Frontiers in Physics
Main Authors:	Poul-Erik Hansen, Sabrina Rostgaard Johannsen, Søren Alkærsig Jensen, Jonas Skovlund Møller Madsen
Format:	Article
Language:	English
Published:	Frontiers Media S.A. 2022-01-01
Subjects:	metrology Mueller ellipsometry inverse modelling scatterometry nanostructures
Online Access:	https://www.frontiersin.org/articles/10.3389/fphy.2021.791459/full