Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate

Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (ED...

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Bibliographic Details

Published in:	Журнал нано- та електронної фізики
Main Authors:	O.E.В Kaipoldayev, A.D.В Muradov, Y.S.В Mukhametkarimov, R.R.В Nemkayeva, G.A.В Baigarinova, M.B.В Aitzhanov, N.R.В Guseinov
Format:	Article
Language:	English
Published:	Sumy State University 2017-10-01
Subjects:	Titanium carbide Magnetron sputtering Raman spectroscopy Transition-metal carbid
Online Access:	http://jnep.sumdu.edu.ua:8080/download/numbers/2017/5/articles/Proof_JNEP_05045.pdf