Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate

• Published in: Журнал нано- та електронної фізики
• Main Authors: O.E.В Kaipoldayev, A.D.В Muradov, Y.S.В Mukhametkarimov, R.R.В Nemkayeva, G.A.В Baigarinova, M.B.В Aitzhanov, N.R.В Guseinov
• Format: Article
• Language: English
• Published: Sumy State University 2017-10-01
• Subjects: Titanium carbide; Magnetron sputtering; Raman spectroscopy; Transition-metal carbid
• Online Access: http://jnep.sumdu.edu.ua:8080/download/numbers/2017/5/articles/Proof_JNEP_05045.pdf
• ISSN: 2077-6772

Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (EDX). Titanium carbide (TiC) structure was obtained by deposition of sputtered carbon atoms and clusters to the resistively heated titanium substrate surface with temperatures 700В В°C, 800В В°C, 900В В°C and 1000В В°C. The XRD analysis showed that the formation of TiC structure is take place when the substrate is heated to 1000В В°C. The Raman spectroscopy showed that when the incident power of laser is 100В % (35В mW) the structure is unstable in samples with the substrate temperatures 700В В°C, 800В В°C and 900В В°C and the most stable titanium carbide structure is created when the substrate temperature is 1000В В°C.