Review of Electrothermal Micromirrors
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based...
| Published in: | Micromachines |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
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| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/3/429 |