Review of Electrothermal Micromirrors
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based...
| Published in: | Micromachines |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
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| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/3/429 |
| _version_ | 1850342754705473536 |
|---|---|
| author | Yue Tang Jianhua Li Lixin Xu Jeong-Bong Lee Huikai Xie |
| author_facet | Yue Tang Jianhua Li Lixin Xu Jeong-Bong Lee Huikai Xie |
| author_sort | Yue Tang |
| collection | DOAJ |
| container_title | Micromachines |
| description | Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced. |
| format | Article |
| id | doaj-art-1be11bc780e14dc0956bc132ebccdf83 |
| institution | Directory of Open Access Journals |
| issn | 2072-666X |
| language | English |
| publishDate | 2022-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| spelling | doaj-art-1be11bc780e14dc0956bc132ebccdf832025-08-19T23:13:30ZengMDPI AGMicromachines2072-666X2022-03-0113342910.3390/mi13030429Review of Electrothermal MicromirrorsYue Tang0Jianhua Li1Lixin Xu2Jeong-Bong Lee3Huikai Xie4School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, ChinaBeijing Engineering Research Center of Detection and Application for Weak Magnetic Field, Department of Physics, University of Science and Technology Beijing, Beijing 100083, ChinaSchool of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, ChinaDepartment of Electrical and Computer Engineering, The University of Texas at Dallas, Richardson, TX 75080, USASchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, ChinaElectrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.https://www.mdpi.com/2072-666X/13/3/429MEMSelectrothermal micromirrorselectrothermal microactuatorsthermal bimorphschevron microactuatorsthermo-pneumatic microactuators |
| spellingShingle | Yue Tang Jianhua Li Lixin Xu Jeong-Bong Lee Huikai Xie Review of Electrothermal Micromirrors MEMS electrothermal micromirrors electrothermal microactuators thermal bimorphs chevron microactuators thermo-pneumatic microactuators |
| title | Review of Electrothermal Micromirrors |
| title_full | Review of Electrothermal Micromirrors |
| title_fullStr | Review of Electrothermal Micromirrors |
| title_full_unstemmed | Review of Electrothermal Micromirrors |
| title_short | Review of Electrothermal Micromirrors |
| title_sort | review of electrothermal micromirrors |
| topic | MEMS electrothermal micromirrors electrothermal microactuators thermal bimorphs chevron microactuators thermo-pneumatic microactuators |
| url | https://www.mdpi.com/2072-666X/13/3/429 |
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