Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators

In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:Micromachines
المؤلفون الرئيسيون: Myungjin Chung, Heijun Jeong, Yong-Kweon Kim, Sungjoon Lim, Chang-Wook Baek
التنسيق: مقال
اللغة:الإنجليزية
منشور في: MDPI AG 2022-08-01
الموضوعات:
millimeter wave
frequency tunable
metamaterial absorber
MEMS cantilever
stress-gradient
plasma ashing
الوصول للمادة أونلاين:https://www.mdpi.com/2072-666X/13/8/1354

الانترنت

https://www.mdpi.com/2072-666X/13/8/1354

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