Effects of post-deposition annealing temperatures in argon ambient on structural, optical, and electrical characteristics of RF magnetron sputtered gallium oxide films

Different post-deposition annealing temperatures were carried out in argon ambient to investigate the corresponding effects onto structural, morphological, optical, and electrical characteristics of RF magnetron sputtered gallium oxide (Ga2O3) films. Cubic phase of γ-Ga2O3 was transformed to mixed p...

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發表在:	Journal of Materials Research and Technology
Main Authors:	Puteri Haslinda Megat Abdul Hedei, Zainuriah Hassan, Hock Jin Quah
格式:	Article
語言:	英语
出版:	Elsevier 2023-01-01
主題:	Gallium oxide Polycrystalline Argon Annealing Wide bandgap Critical electric field
在線閱讀:	http://www.sciencedirect.com/science/article/pii/S2238785422018567