Characterization of DLC Thin Films Deposited by DC-Pulsed PACVD using Methane Precursor

In this work, Diamond Like Carbon (DLC) thin films were deposited on aluminum alloy 6061 by Plasma-Assisted Chemical Vapor Deposition (PACVD). Nitiding prior to coated leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coatings. The composition, crysta...

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Bibliographic Details

Published in:	International Journal of Advanced Design and Manufacturing Technology
Main Authors:	seyed mohammad mahdi shafiei, Hamed raeiesifard
Format:	Article
Language:	English
Published:	Islamic Azad University-Isfahan (Khorasgan) Branch 2022-03-01
Subjects:	dlc pacvd thin film tribology
Online Access:	https://admt.isfahan.iau.ir/article_689935_3f5dff04365d9ea68b450e11dde516d4.pdf