Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing

Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a local CNT synthesis process using thermal chemical vapor deposition (CVD) require...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Avisek Roy, Mehdi Azadmehr, Bao Q. Ta, Philipp Häfliger, Knut E. Aasmundtveit
Format:	Article
Language:	English
Published:	MDPI AG 2019-10-01
Subjects:	carbon nanotube local cnt synthesis cmos–cnt integration microstructures microheater cmos-compatible temperature
Online Access:	https://www.mdpi.com/1424-8220/19/19/4340