Modeling and Reliability Analysis of MEMS Gyroscope Rotor Parameters under Vibrational Stress

Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for evaluating the reliability of parameter degradation u...

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出版年:	Micromachines
主要な著者:	Lei Wang, Yuehong Pan, Kai Li, Lilong He, Qingyi Wang, Weidong Wang
フォーマット:	論文
言語:	英語
出版事項:	MDPI AG 2024-05-01
主題:	MEMS gyroscope degradation of rotor parameters reliability evaluation copula function vibration environment
オンライン･アクセス:	https://www.mdpi.com/2072-666X/15/5/648