A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature

Disease screening by exhaled breath diagnosis is less burdensome for patients, and various devices have been developed as promising diagnostic methods. We developed a microelectromechanical system (MEMS) optical interferometric surface stress sensor to detect volatile ethanol gas at room temperature...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:Sensors
المؤلفون الرئيسيون: Toshiaki Takahashi, Yong-Joon Choi, Kazuaki Sawada, Kazuhiro Takahashi
التنسيق: مقال
اللغة:الإنجليزية
منشور في: MDPI AG 2020-11-01
الموضوعات:
fabry–perot interference
microelectromechanical systems
surface stress sensor
optical interferometry
film transfer technique
volatile organic compounds
الوصول للمادة أونلاين:https://www.mdpi.com/1424-8220/20/23/6868

الانترنت

https://www.mdpi.com/1424-8220/20/23/6868

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