Investigation on a Linear Piezoelectric Actuator Based on Stick-Slip/Scan Excitation

To perform a high resolution and long stroke application in optical precision instruments, a linear piezoelectric actuator operated in stick-slip/scan modes for driving a linear motion table is presented. The proposed piezoelectric actuator is a piezoelectric composite structure, which includes a me...

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書誌詳細

出版年:	Actuators
主要な著者:	Yunlai Shi, Chengshu Lou, Jun Zhang
フォーマット:	論文
言語:	英語
出版事項:	MDPI AG 2021-02-01
主題:	stick-slip mode scan mode linear motion table high resolution piezoelectric actuator
オンライン･アクセス:	https://www.mdpi.com/2076-0825/10/2/39